English
Vacuum pump/molecular pump bearings • Nanoscale accuracy: Vacuum leakage rate<1 × 10 ⁻¹² Pa · m ³/s, suitable for ASML lithography machine 3nm chip manufacturing, supporting the upgrading of the semiconductor industry. • Ultra high speed performance: The molecular pump bearings have a rotational speed of 120000rpm, poor thermal conductivity, low friction coefficient, and a lifespan of up to 100000 hours.
Vacuum pump/molecular pump bearings
• Nanoscale accuracy: Vacuum leakage rate<1 × 10 ⁻¹² Pa · m ³/s, suitable for ASML lithography machine 3nm chip manufacturing, supporting the upgrading of the semiconductor industry.
• Ultra high speed performance: The molecular pump bearings have a rotational speed of 120000rpm, poor thermal conductivity, low friction coefficient, and a lifespan of up to 100000 hours.
BARIONIX, a German company, was established in 1998 in Darmstadt, Germany. As a technology and innovation center in Germany, Darmstadt provides a unique environment for the research and production of Bale bearings.
